Modified SCMOS DEEP Layout Rules for EECS 427

Layout Rules - Well

Rule Description Lambda
DEEP
1.1 Minimum width 12
1.2 Minimum spacing between wells at different potential 18
1.3 Minimum spacing between wells at same potential 6
1.4 Minimum spacing between wells of different type (if both are drawn) 0


Layout Rules - Active

Rule Description Lambda
DEEP
2.1 Minimum width 3
2.2 Minimum spacing 3
2.3 Source/drain active to well edge 6
2.4 Substrate/well contact active to well edge 3
2.5 Minimum spacing between non-abutting active of different implant. Abutting active ("split-active") is illustrated under Layout Rules - Select. 4


Layout Rules - Poly

Rule Description Lambda
DEEP
3.1 Minimum width 2
3.2 Minimum spacing over field 3
3.2.a Minimum spacing over active 4
3.3 Minimum gate extension of active 2.5
3.4 Minimum active extension of poly 4
3.5 Minimum field poly to active 1

 

Layout Rules - Select

Rule Description Lambda
DEEP
4.1 Minimum select spacing to channel of transistor to ensure adequate source/drain width 3
4.2 Minimum select overlap of active 2
4.3 Minimum select overlap of contact 1.5
4.4 Minimum select width and spacing
(Note: P-select and N-select may be coincident, but must not overlap) (not illustrated) 		4


Layout Rules - Contact to Poly

Rule Description Lambda
DEEP
5.1 Exact contact size 2x2
5.2b Minimum poly overlap 1
5.3 Minimum contact spacing 4
5.4 Minimum spacing to gate of transistor 2
5.6.b Minimum spacing to active (one contact) 2
5.7.b Minimum spacing to active (many contacts) 3

 

Layout Rules - Contact to Active

Rule Description Lambda
DEEP
6.1 Exact contact size 2x2
6.2.b Minimum active overlap 1
6.3 Minimum contact spacing 4
6.4 Minimum spacing to gate of transistor 2
Rule Description Lambda
DEEP
6.5.b Minimum spacing to diffusion active 5
6.6.b Minimum spacing to field poly (one contact) 2
6.7.b Minimum spacing to field poly (many contacts) 3
6.8.b Minimum spacing to poly contact 4

 

Layout Rules - Metal1

Rule Description Lambda
DEEP
7.1 Minimum width 3
7.2 Minimum spacing 3
7.3 Minimum overlap of any contact 1
7.4 Minimum spacing when either metal line is wider than 10 lambda 6

 

Layout Rules - Via

Rule Description Lambda
DEEP
8.1 Exact size 3 x 3
8.2 Minimum via1 spacing 3
8.3 Minimum overlap by metal1 1

Layout Rules - Metal2

Rule Description Lambda
DEEP
9.1 Minimum width 3
9.2 Minimum spacing 4
9.3.r0 Minimum overlap of via1 0
9.3.r1 Minimum extension of via1 1
9.3.r2 Minimum area 25 (5x5)
9.4 Minimum spacing when either metal line is wider than 10 lambda 8


Layout Rules - Via2


Rule Description Lambda
DEEP
14.1 Exact size 3x3
14.2 Minimum spacing 3
14.3.r0 Minimum overlap by metal2 0
14.3.r0 Minimum extension by metal2 1

 

Layout Rules - Metal3

Rule Description Lambda
DEEP
15.1 Minimum width 3
15.2 Minimum spacing to metal3 4
15.3.r0 Minimum overlap of via2 0
15.3.r1 Minimum extension of via2 1
15.3.r0 Minimum area 25 (5x5)
15.4 Minimum spacing when either metal line is wider than 10 lambda 8