NNIN Seminar

Debugging MEMS Process Flows with Physical Simulation

Tom Hall

Applications Manager
Thursday, December 13, 2012
1:00pm - 2:00pm

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About the Event

Traditionally, process flow simulation has been performed using geometrical approximation methods. While effective, certain processes will not be simulated with adequate accuracy. This webinar will explore the benefits of physical process simulation. IntelliSense has been known for their physical process simulation tools like RECIPE, IntelliEtch, and Exposure. All of this functionality is now integrated into a new process simulator, FabSim. In this webinar, we will quickly create photo-realistic process models using full physical simulation. We will compare the different methods and explore how physical simulation can save valuable time and cost in the cleanroom by eliminating unneeded fabrication iterations. The examples explored will include some popular process design kits involving multiple processes.


Tom Hall is a Sales and Applications Manager at IntelliSense. He has a wealth of experience in MEMS design, CAD/FEA simulation, and customer education and training. He has been an integral part of the IntelliSense team by fostering healthy business relationships with current customers and keeping prospective and current users informed about the latest software developments from IntelliSense. Tom has extensive CAD expertise and a strong background in mechanical and manufacturing engineering. Tom holds a degree in Mechanical Engineering from Boston University.

Additional Information

Contact: Dr. Behrouz Shiari

Phone: 734-615-4804


Sponsor(s): NNIN Computation (NNIN/C) Project at Michigan

Open to: Public

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