NNIN Seminar

IntelliSuite Workshop: An end-to-end Solution for MEMS Design and Simulation

Tom Hall

Application Manager at IntelliSuite
 
Thursday, February 13, 2014
12:00pm - 4:00pm
Rooms 1 & 2, Duderstadt Center

 

About the Event

This free workshop will introduce cutting-edge methodology and tools for MEMS/NEMS design, analysis, fabrication simulation, and more. Attendees will learn more about the IntelliSuite family of tools, view live demonstrations, get a first look at the newest software version, and have the opportunity to try some hands-on tutorials.

Agenda:

12:15 Registration and Coffee

12:30 Welcome and Introduction to IntelliSuite v8.7

1:00 Device Simulation

  • Overview of IntelliSense’s Fastfield Multiphysics simulators and behavioral analysis tool
  • Live Demo: Simulation of magnetostrictive devices with ThermoElectroMechanical (TEM)
  • Live Demo: Behavioral and Parametric modeling with SYNPLE
1:45 CleanRoom Process Tool Suite

  • In-depth look at IntelliSense’s process simulation tools
  • Live Demo 1: MUMPs process flow generation with IntelliFab and visualizing with FabSim
  • Live Demo 2: Anisotropic etch simulation with IntelliEtchG
2:15 Break

2:30 Hands-on Tutorials

  • Comb drive layout design and parametric scripting with Blueprint
  • Physical process simulation with FabSim
  • Working with and converting 2D layouts and 3D models
3:30 What’s coming next with IntelliSuite v8.8?

  • Enhanced Blueprint drawing tools and Hexpresso meshing capability
  • New process simulation and device simulation features
  • System simulation enhancements and parametric analysis features
3:50 Wrap-up and closing comments

Additional Information

Contact: Dr. Behrouz Shiari

Phone: 734-615-4804

Email: bshiari@umich.edu

Event Sponsor: ECE

Open to: Public

Web Page: http://lnf.umich.edu/nnin-at-michigan/2014/01/16/intellisuite-workshop-an-end-to-end-solution-for-mems-design-and-simulation/