Electrical Engineering and Computer Science

MEMS and Microsystems Faculty

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faculty photo Kurabayashi, Katsuo
Associate Professor, Mechanical Engineering
Associate Professor (courtesy), Electrical Engineering and Computer Science
Division: ECE
Address: 2272 G.G.Bown Lab
Email: katsuo @ umich.edu
Phone: (734) 615-5211
Research Interests: Micro/nano engineering, including micro/nano optical devices, microactuators, MEMS/Bio hybrid technology, polymer-MEMS, nanoscale electron/phonon transport phenomena, and nanofabrication.
 
faculty photo Kushner, Mark J.   
George I. Haddad Professor of Electrical Engineering and Computer Science
Professor, Electrical Engineering and Computer Science
Professor (courtesy), Nuclear Engineering and Radiological Sciences; Chemical Engineering; Applied Physics
Division: ECE
Address: 2236 EECS
Email: mjkush @ umich.edu
Phone: (734) 647-1695
Research Interests: Plasma science and technology: materials processing, propulsion, lasers, electromagnetics, plasma chemistry, microelectronics/MEMS fabrication, polymer functionalization, biocompatibility