MEMS and Microsystems
This research area encompasses projects on a variety of micromachined sensors and actuators, and on integrated microsystems that combine these components. Devices such as micromachined neural probes for implantable prostheses, ultra-miniature low-power pressure sensors for catheters, tactile sensors arrays for fingerprint analysis, infra-red imagers for manufacturing process control, and micro gas chromatography systems for environmental monitoring are some of the past contributions of this program. The scope of the current research efforts encompasses exploration of new materials, new device concepts, new fabrication methods, new interface circuits, and new microsystems.|
MEMS Technology and Packaging
Microfluidics and Gas/Chemical
Plasma Fabrication and Plasma Based MEMS Devices
Power Sources and Energy Harvesting
Related LinksWireless Integrated MicroSensing & Systems (WIMS2)
Related News Articles2017-06-08 ECE Alum Kukjin Chun Earns South Korea's Highest Scientific Honor 2017-03-02 Azadeh Ansari Receives ProQuest Distinguished Dissertation Award for... 2017-01-30 A Q&A with Rhonda Franklin Connecting Diverse Students 2016-09-26 Cancer stem cells: new method analyzes 10,000 cells at once 2016-06-23 Leaders in Neuroscience Look to the Future 2016-04-07 Clark Zhang Earns NSF Fellowship for Data Processing in MEMS Networks 2016-03-14 MEMS research to assist in treatment of glaucoma selected as a... 2016-03-14 MEMS Fabrication Research Highlighted by the Journal of... 2016-02-29 Cutting the Cost of Hearing 2016-02-03 Muzhi Wang Earns a Best Paper Award for a New Tunable Filter for... 2015-10-12 Dr. Tzeno Galchev is the winner of the 2015 John Atanasoff Award 2015-09-22 ISS, founded by ECE Alumni and Faculty, to Exhibit Wireless... 2015-08-25 Nader Najafi: A Dream That Saves Lives 2013-09-21 Nanotechnology and Progress: A Quantum Entanglement 2010-09-21 Green Computing: Higher Energy Efficiency from Silicon to the Cloud 2005-09-21 George Haddad: A Remarkable Legacy 2015-05-19 What makes cancer cells spread? New device offers clues 2015-01-05 How drones and insects merged in ways that might surprise you 2014-09-17 Student Spotlight: Tal Nagourney - Exploring navigation 2014-06-18 MEMS Research by Muzhi Wang Recognized at IMS 2014 2014-04-22 Mina Rais-Zadeh Receives 2014 ONR Young Investigator Program (YIP)... 2013-10-17 Better miniaturized vacuum pumps for electronics and sensors 2013-07-10 When GPS fails, this speck of an electronic device could step in 2013-07-01 Neural Probe Research Recognized with Best Paper Award at 2013... 2013-07-01 MEMS Research Recognized with Best Poster Award at 2013 Transducers... 2013-06-07 Penny-Sized Vacuum System Could Help Detect Chemical Weapons 2013-05-30 Workshop to Chart the Future of Nano and Micro Manufacturing 2012-08-16 Mina Rais-Zadeh Receives NASA Early Career Grant to Develop... 2011-11-22 Insect cyborgs to search and monitor hazardous environs 2011-11-22 ECE Startup ePack, Inc. Wins Masco Next Gen Manufacturing Award at... 2011-06-16 A minimally-invasive brain implant to translate thoughts into movement 2011-04-26 Most powerful millimeter-scale energy harvester generates electricity... 2011-01-25 Mina Rais-Zadeh Receives NSF CAREER Award 2010-03-22 Mini generators make energy from random ambient vibrations 2009-01-20 Smart Bridges Under Development with New Grant 2008-12-03 Gas pump made of minerals has no moving parts 2008-11-07 Microsystems Research for Energy Scavenging and Power Generation 2006-06-21 Tiny wireless Geiger counter detects radiation
ECE FacultyAktakka, Ethem Erkan
Blaauw, David T.
Cho, Jae Yoong
Flynn, Michael P.
Gianchandani, Yogesh B.
Kushner, Mark J.
Peterson, Becky (R.L.)
Courtesy FacultyChestek, Cynthia
Lynch, Jerome P.