Electrical Engineering and Computer Science

MEMS and Microsystems

This research area encompasses projects on a variety of micromachined sensors and actuators, and on integrated microsystems that combine these components. Devices such as micromachined neural probes for implantable prostheses, ultra-miniature low-power pressure sensors for catheters, tactile sensors arrays for fingerprint analysis, infra-red imagers for manufacturing process control, and micro gas chromatography systems for environmental monitoring are some of the past contributions of this program. The scope of the current research efforts encompasses exploration of new materials, new device concepts, new fabrication methods, new interface circuits, and new microsystems.

Specialties

Environmental Sensors
Implantable Devices
MEMS Technology and Packaging
Microfluidics and Gas/Chemical
Plasma Fabrication and Plasma Based MEMS Devices
Power Sources and Energy Harvesting
RF MEMS

Related Links

Wireless Integrated MicroSensing & Systems (WIMS2)

Related News Articles

2012-07-24  Kensall D. Wise: Michigan, MEMS and Microsystems
2017-06-08  ECE Alum Kukjin Chun Earns South Korea's Highest Scientific Honor
2017-03-02  Azadeh Ansari Receives ProQuest Distinguished Dissertation Award for...
2017-01-30  A Q&A with Rhonda Franklin Connecting Diverse Students
2016-09-26  Cancer stem cells: new method analyzes 10,000 cells at once
2016-06-23  Leaders in Neuroscience Look to the Future
2016-04-07  Clark Zhang Earns NSF Fellowship for Data Processing in MEMS Networks
2016-03-14  MEMS research to assist in treatment of glaucoma selected as a...
2016-03-14  MEMS Fabrication Research Highlighted by the Journal of...
2016-02-29  Cutting the Cost of Hearing
2016-02-03  Muzhi Wang Earns a Best Paper Award for a New Tunable Filter for...
2015-10-12  Dr. Tzeno Galchev is the winner of the 2015 John Atanasoff Award
2015-09-22  ISS, founded by ECE Alumni and Faculty, to Exhibit Wireless...
2015-08-25  Nader Najafi: A Dream That Saves Lives
2013-09-21  Nanotechnology and Progress: A Quantum Entanglement
2010-09-21  Green Computing: Higher Energy Efficiency from Silicon to the Cloud
2005-09-21  George Haddad: A Remarkable Legacy
2015-05-19  What makes cancer cells spread? New device offers clues
2015-01-05  How drones and insects merged in ways that might surprise you
2014-09-17  Student Spotlight: Tal Nagourney - Exploring navigation
2014-06-18  MEMS Research by Muzhi Wang Recognized at IMS 2014
2014-04-22  Mina Rais-Zadeh Receives 2014 ONR Young Investigator Program (YIP)...
2013-10-17  Better miniaturized vacuum pumps for electronics and sensors
2013-07-10  When GPS fails, this speck of an electronic device could step in
2013-07-01  Neural Probe Research Recognized with Best Paper Award at 2013...
2013-07-01  MEMS Research Recognized with Best Poster Award at 2013 Transducers...
2013-06-07  Penny-Sized Vacuum System Could Help Detect Chemical Weapons
2013-05-30  Workshop to Chart the Future of Nano and Micro Manufacturing
2012-08-16  Mina Rais-Zadeh Receives NASA Early Career Grant to Develop...
2011-11-22  Insect cyborgs to search and monitor hazardous environs
2011-11-22  ECE Startup ePack, Inc. Wins Masco Next Gen Manufacturing Award at...
2011-06-16  A minimally-invasive brain implant to translate thoughts into movement
2011-04-26  Most powerful millimeter-scale energy harvester generates electricity...
2011-01-25  Mina Rais-Zadeh Receives NSF CAREER Award
2010-03-22  Mini generators make energy from random ambient vibrations
2009-01-20  Smart Bridges Under Development with New Grant
2008-12-03  Gas pump made of minerals has no moving parts
2008-11-07  Microsystems Research for Energy Scavenging and Power Generation
2006-06-21  Tiny wireless Geiger counter detects radiation

ECE Faculty

Aktakka, Ethem Erkan
Blaauw, David T.
Chen, Yu-Chih
Cho, Jae Yoong
Deotare, Parag
Flynn, Michael P.
Gianchandani, Yogesh B.
Kushner, Mark J.
Li, Tao
Najafi, Khalil
Peterson, Becky (R.L.)
Qin, Yutao
Rais-Zadeh, Mina
Sarabandi, Kamal
Seymour, John
Sylvester, Dennis
Woo, Jong-Kwan
Yoon, Euisik

Courtesy Faculty

Chestek, Cynthia
Kurabayashi, Katsuo
Lynch, Jerome P.

Postdocs

Voroslakos, Mihaly