MEMS and Microsystems
This research area encompasses projects on a variety of micromachined sensors and actuators, and on integrated microsystems that combine these components. Devices such as micromachined neural probes for implantable prostheses, ultra-miniature low-power pressure sensors for catheters, tactile sensors arrays for fingerprint analysis, infra-red imagers for manufacturing process control, and micro gas chromatography systems for environmental monitoring are some of the past contributions of this program. The scope of the current research efforts encompasses exploration of new materials, new device concepts, new fabrication methods, new interface circuits, and new microsystems.|
MEMS Technology and Packaging
Microfluidics and Gas/Chemical
Plasma Fabrication and Plasma Based MEMS Devices
Power Sources and Energy Harvesting
Related LinksWireless Integrated MicroSensing & Systems (WIMS2)
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ECE FacultyAktakka, Ethem Erkan
Blaauw, David T.
Cho, Jae Yoong
Flynn, Michael P.
Gianchandani, Yogesh B.
Kushner, Mark J.
Peterson, Becky (R.L.)
Courtesy FacultyChestek, Cynthia
Lynch, Jerome P.