Electrical Engineering and Computer Science

Nanotechnology and Nanofabrication

There are strong efforts in SSEL in nanoscience and nanotechnology and significant advancements were achieved recently in developing new nanotechnologies and exploring many novel applications. These accomplishment include new nanoimprint techniques and combinations of nanoimprint with photolithography, new polymer material development for nanostructure patterning with conventional tools; new printing techniques for organic electronics; the exploration of nanostructures for various biological applications; new biosensor development based on metallic nanostructures and photonic microresonators; and the exploitation of nanofabricated Si tip arrays for THz applications.
Deotare, Parag
Guo, L. Jay
Lee, Somin Eunice
Lu, Wei
Peterson, Becky (R.L.)
Zhong, Zhaohui

Related Labs, Centers, and Groups
Lurie Nanofabricaton Facility