Electrical Engineering and Computer Science

Plasma Fabrication and Plasma Based MEMS Devices

Research Areas -> Plasma Science and Engineering -> Plasma Fabrication and Plasma Based MEMS Devices
 
 
Faculty
Gianchandani, Yogesh
Kushner, Mark J.


Related Labs, Centers, and Groups
DOE Center for Predictive Control of Plasma Kinetics
Michigan Institute for Plasma Science and Engineering
Radiation Laboratory