MEMS Transmission Lines

Transmission line for millimeter-wave circuits requires low-loss, low-dispersion. But, as increasing the frequency, transmission line using commercial process suffer from several problems, such as dielectric loss, dispersion, radiation loss, etc.

Transmission lines have been fabricated by our surface micromachining technology. Because we use thick copper line for metal and air for dielectric material, the ohmic and dielectric loss of transmission line are significantly reduced. The fabricated transmission line on the standard silicon substrate has shown a very low loss of ?0.1dB/mm at 18GHz.

Figure 1. SEM photograph and performance of fabricated suspended transmission line

Figure 2. SEM photograph of suspended transmission line and coaxial line

Related Publication
  1. J.-B. Yoon, et al, "3-D lithography and metal surface micromachining for RF and microwave MEMS", in IEEE MEMS '02 Tech. Dig., pp.673-676, Jan. 2002
  2. Eun-Chul Park, Yun-Suk Choi, Byeong-Il Kim, Jun-Bo Yoon and Euisik Yoon, "A LOW LOSS MEMS TRANSMISSION LINE WITH SHIELDED GROUND," IEEE International MEMS conference 2003, Kyoto, Japan.